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4H-sc e kopanetsoe e le thepa bakeng sa lisebelisoa tsa semiconductor tse sebetsang. Leha ho le joalo, ho tšepahala ho nako e telele ea lisebelisoa tsa 4h ke tšitiso ea ho sebelisa lingoliloeng tsa bona tse ngata tsa lisebelisoa tsa 4h. Pherekano ena e bakoa ke phoso e le 'ngoe ea shockley e le' ngoe ea lefutso le le leng la 1sf Mona, re etsa tlhahiso ea hore ho hatella kholo ea 1SF Pin diodes e tsamaisoa ka wafers le ho kenella ha Polonse ho bonts'a litšobotsi tse tšoanang tsa motlakase joaloka li-diodes ntle le ho kenella ha projeke. Ka lehlakoreng le leng, kenkhoeng ea 1sF e hatelloa ka botlalo ho Pini ea Pine ea Proton-Conshlat. Kahoo, ho kenella ha li-scers tse ngata tsa 4h-Sys Liphetho tsena li etsa hore ho be le lisebelisoa tse tšepahalang tse tšepahalang haholo.
Silizon carbide (SIC) e ratoa haholo ke semisonductor Ho na le li-polytypes tse ngata tsa tšepe tse ngata, har'a tsona tsa 4h tse nang le moea o motle oa semiconductor tse kang tšimo e phahameng ea elektrone le tšimo e matla ea motlakase. 4H-SIC Wefers e nang le bophara ba li-inches tse 6 hona joale li fumaneha bakeng sa tlhahiso e kholo ea tlhahiso ea semiconductor e etsang sesebelisoa sa motlakase Tsamaiso ea lifofane tsa likoloi tsa motlakase le literene li entsoe ka mokhoa o hlophisitsoeng o sebelisa lisebelisoa tsa semiconductor. Leha ho le joalo, lisebelisoa tsa 4H tsa SIC tse ntseng li na le mathata a bophelo bo joalo a ho thibeloa kapa ho tšepahala ho feta tsa potoloho ea botshepehi. Phello ena ea ho hlapela ea ho ba ntho ea tšohanyetso e fumanoe lilemong tse fetang tse 20 tse fetileng 'me ke khale e bile bothata ho sic sesebelisoa sa sesebelisoa.
Ho etsa qeto ho bakoang ke lefu la pherekano ho bakoang ke likhalase tsa temo e le 'ngoe ka li-kristale tse peli le lifofane tsa Basal. Ka hona, haeba keketseho ea BPD e hatelloa ho 1SSF, lisebelisoa tsa matla a 4H li ka fanoa ntle le tšilafalo ea kelello. Ho tlalehiloe mekhoa e mengata ea ho hatella BPD ho ea le ho teba, joalo ka BPD ho Tump ho Tumf ho Threaging Lifekeng tsa morao-rao tsa SIC tsa morao-rao, haholo-holo li-sofstrate e teng ka har'a karoloana ea li-opitaxe ka lebaka la ho songoa ha BPD ho ea kholo. Ka hona, bothata bo setseng ba phepelo ea 'mele ke kabo ea bpD ka har'a 25,26,27. Ho kenngoa ha "ho ts'oaroa ha" ho ts'oaroa ha "ho ts'oarana le karolo ea 29, 30, 31. Setho se phahamisang setloholo sa li-electrol le substrate. Ho fokotsa palo ea lipara tsa li-electrol-hole ho fokotsa matla a ho khanna adg ho bpd ka substrate, ka hona, karolo ea sebopeho sa pompo e ka hatella. Re lokela ho hlokomela hore ho kenngoa ha mokalli le thata ho hlahisa lintoa, 'me ntle le ho kenngoa ha sekala ho thata ho laola maemo a bophelo ba motlakase. Ka hona, ho sa na le tlhoko e matla ea ho ba le mekhoa e meng ea khatello ea khatello ea ho fumana teka-tekano lipakeng tsa sesebelisoa sa tlhahiso ea sesebelisoa.
Hobane katoloso ea BPD ho 1SF e hloka ho sisinyeha ha lithethefatsi (PDS), PDS), ho penta PD ke mokhoa o tšepisang oa ho thibela ho senyeha ha pelo. Leha pd pente ea mehala e tlalehiloe ka li-flip tse substrate ea 4h e sebakeng se fetang 5 μm ho tloha holimo sepitaxial. Ntle le moo, kaha ke ho anyeha ha ho sa bonahale ka matla ha tšepe efe kapa efe ea SIC e nyane haholo, ho thata ho litlolo tsa tšepe hore li felise karolong ea tšepe hore li felise ka har'a substrate34. Ka lebaka la boima bo boholo bo boholo ba tšepe, ho reka ha inime ho boetse ho thata. Ho fapana le moo, ntlheng ea hydrojene, ntho e bobebe, li-Ions Ka hona, haeba ho kenella ha projeke ho ama pd pre ea phatsimang ea BPD ka substrate. Leha ho le joalo, ho kenella ha proton ho ka senya 4h-SIC le sephetho ho ts'ebetso ea sesebelisoa se fokotsoeng bakeng sa ts'ebetso ea sesebelisoa se fokotsoeng37,38,38,39.
Ho hlola phetlo ea sesebelisoa ka lebaka la ho kenella ha pronnant, ho tsamaisana le mocheso o phahameng haholo ho sebelisa chelete e ngata ho sesebelisoa sa hae sa motlakase. Ha ea lekana ho bona ho tsitsillela ha PR a sebelisa sims. Ka hona, thutong ena, re ne re kenya li-proceen ho li-pitaxial tsa 4h tse nang le sic-sign pele ho sesebelisoa sa ho thekesela, ho kenyelletsa mocheso o phahameng oa mocheso. Re sebelisitse li-diolice tsa PIN e le meaho ea sesebelisoa sa liteko tsa tlhahlobo ea maikutlo le ho li reka ka li-wafter tsa 4h tse kentsoeng. Eaba re boloka litšobotsi tsa Volt-AMPT-AMPT - Ho ithuta ho nyenyefatsa ts'ebetso ea sesebelisoa ka lebaka la ente ea proton. Kamora moo, re ile ra bona keketseho ea 1sf ka ho eketsa litšoantšo (El) ka mor'a ho sebelisa chelete ea motlakase ho ea ho Pin Diode. Qetellong, re ile ra tiisa phello ea ente ea proton ho fana ka khatello ea eketseha 1SSF.
Ho feiga. Setšoantšo sa 1 se bonts'a litšobotsi tsa motlakase tsa hona joale (CVCS) ea li-diode tsa PIN ka mocheso oa kamore ho libaka tsa kamore le ntle le ho phallela hajoale. PIN Diodes le ente ea Boine ba PIN SCACT VINONA COUNESTIONSOTHO COSA LITLHAKISO TSE TLANG HANGATA, Leha litšobotsi tsa IV li arolelanoa lipakeng tsa li-diodes. Ho supa phapano lipakeng tsa maemo a ente, re ile ra rera maqhubu a Voltage a ho fetisoa ke palo ea Statistage ea 2. mola. Joalokaha ho ka bonoa ho tsoa litlhoro tsa li-clive, ho khathala hanyane ka hanyane le ka 1016 cm. Hape re ne re etsa ho kenella ha ho phatloha ha phollatsi ea li-diolication tsa pie tse sa kang tsa supa ka lebaka la tšenyo ea S1 joalo ka ha ho hlalositsoe lithutong tse fetileng. Ka hona, e kopanya ka 1600 ° ° ke mohato o hlokahalang oa ho kenya tšebetsong chelete ea Alcrat Khafetsa khafetsa ho-25 v e hlahisoa ka setšoantšo sa s2, ha ho phapang ea bohlokoa lipakeng tsa li-giodes ntle le ente.
Litšobotsi tsa Volt-AMpere tsa li-diodes tsa PIN le ntle le ho kenngoa lipapatso ka mocheso oa kamore. Legend e bontša tekanyetso ea liprosen.
Khampasi ea Voltage ka kotloloho ea hajoale Leeto le hlotsitsoeng le amana le kabo e tloaelehileng.
Ho feiga. 3 e bonts'a setšoantšo sa el ea DIVDE e nang le letsoalo la hona joale ea 25 A / cm2 kamora. Pele o sebelisa mojaro oa hona joale, libaka tse lefifi tsa diode ha lia ka tsa bonoa, joalo ka ha ho bontšitsoe ho setšoantšo sa 3. C2. Leha ho le joalo, joalo ka ha ho bontšitsoe ho feiga. 3a, ka piode e se nang pin e sa kenense ho phatloha, e leng libaka tse 'maloa tse lefifi tse nang le khanya e bobebe e nang le li-modulage ea motlakase. Libaka tse lefifi joalo tse betliloeng joalo li bonoa litšoantšong tsa 1sf ho tloha bpd ho substrac28,29. Sebakeng seo, ba bang ba atoloha liphoso ba atoloha ba ile ba bonoa Diodes ea Pine ka li-procrade tse kentsoeng, joalo ka ha ho bonts'itsoe ho feiga. 3B-d. Ho sebelisa vo-ray topo Li-diode li bontšoa ka lipalo 1 le 2. Livideo S6-s6 le libaka tse atolositsoeng ka ente ea PIN
El litšoantšo tsa li-diolise tse 25 A / cm2 kamora lihora tse peli tsa khatello ea motlakase le litekanyetso tse kentsoeng ka eona. 2 le (d) liprofinse tsa 1016 cm.
Re ile ra bala letsoalo la 1sf ea 1 e atolositsoeng ka ho bala likarolo tse tharo bakeng sa setšoantšo se fetang 1012, e le tlase haholo.
Metsi a eketsehileng a SF Pin Piodes ea SF e nang le ho kenella ha projeke ka mor'a ho kenya likotlo tsa hajoale (naha ka 'ngoe e kenyelelitsoe.
Ho khutsufatsa bophelo ba thepa hape ho boetse ho ama tlhaselo ea ketekoa, le ente ea proton e fokotsa bophelo ba thepa ea bophelo bohle ba thepa ea bophelo bohle. Re kentsoe bophelo ba thepa ka mokatong oa li-epitaxial 60 μm botenya bo nang le li-procents tse ka hare ho 1014 cm-2. Ho tloha nakong ea bophelo ba pelehi tsa pele, leha ho hlomphuoang ho etsa boleng ho ~ 10%, ho latela menyaka ho e khutlisa ho j7. Ka hona, bophelo ba bo-bong bo ile ba fokotsoa ka lebaka la ho kenella ha proton, bo khutlisoa ke ho tsosa mocheso o phahameng oa mocheso. Le ha ho fanoa ka phokotso ea 50% bophelong ba Carrier hape ho hatella liphoso tsa bafani, litšobotsi tse bobebe, bonts'a lits'oants'o tse nyane pakeng tsa li-goods tse fokolang le tse sa kenngoeng. Ka hona, re lumela hore Khokahano e ts'oasa karolo ho atisa ho thibela holisa katoloso ea 1sF.
Le ha Sims e bone Filedrogen ka mor'a ho kopanya liphula tsa 1sF, re hlokometse hore li-PD tsa ho lemoha litsoi ho kenella. Re lokela ho hlokomela hore ha re so ka re tiisa keketseho ea ho hanyetsa ha ho hanyetsa Sena se ka ba ka lebaka la mabitso a sa phethahalang a ileng a etsoa a sebelisa ts'ebetso ea rona, e tla felisoa haufinyane.
Qetellong, re ile ra ba le mokhoa oa ho emisa ho holisa BPD ho isa ho 1h-SIC Pini ea 4h-SIC Piok Ho fokola ha tšobotsi ea I-ea V ho kenella ha proston ho sa bohlokoa, haholo-holo nakong ea proton khao - empa phello ea ho hatella kholo ea 1SF e bohlokoa. Le ha re ithuta ka makhetlo a 10 μmma tse teteaneng tsa pini ea PIN ka ho kenella ka botebo ba 10 μm, e ntse e khona ho ntlafatsa mefuta e meng ea lisebelisoa tsa 4h. Litsenyehelo tse eketsehileng bakeng sa mohloa oa sesebelisoa nakong ea ho kenella ha libuka li lokela ho tšohloa, empa li tla tšoana le tsa lisebelisoa tsa moea tsa aluminum, e leng ts'ebetso ea mantlha ea methapo ea kutlo. Kahoo, ho kenella ha sesebelisoa pele ho sesebelisoa sa sesebelisoa ke mokhoa o ka bang teng bakeng sa ho hlophisa lisebelisoa tsa matla a 4h-Sic-Sic-Sic-Sipro-stic ntle le ho se sebetse.
Mofuta oa 4h-SIV-sic Waferness e nang le linoko tse 10 μm le mofofisi oa mofofisi oa ho etsa lintho tse 1 × 1016 cm e ne e sebelisoa e le sampole. Pele o sebetsa sesebelisoa, H + Ions e ne e kenngoa ka poleiti e nang le matla a ho atisang a 0,95 mev ka sekhahla se ka bang 10 μm ka lehlakoreng le tloaelehileng ho ea polelong. Nakong ea phallo ea tsebo, maske a poleiti e ne e sebelisoa ntle le ka tekanyetso ea 1012, 1016, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, kapa 1014, le 1014 Joale, li-ion tse nang le litekanyetso tsa 1020 le la 1017 cm-3 li ile tsa kenngoa ka lebaka la botebo ba 0-0.2 μm le 0.2-0.5 μm ho tsoa holimo ka har'a 1600 μme -kpe. Kamora moo, Ikopanye le morao-rao ea morao-rao e ne e kentsoe ka lehlakoreng le tlase, ha e le ka lehlakoreng la 2,0 MM Qetellong, ikopanye le mohono o etsoa ka mocheso oa 700 ° C. Ka mor'a ho hlatsoa li-chips, re ile ra etsa hore khatello ea maikutlo le ts'ebeliso.
Litšobotsi tsa i-V tsa li-diode tsa pen tse nang le masela li ile tsa bonoa li sebelisa paramente ea hp4155b paramente ea hp415bb. E le khatello ea motlakase, mylisecond e theohileng ea 212,5 A / CM2 e hlahisitsoe lihora tse 2 ho ea ho 10 Pulses / Sec. Ha re khelosa botle bo tlase ba hona joale kapa khafetsa, ha rea ka ra bona esale pele ho holisa 1sF esita leha re ntse re kenya peniseng e se nang le ente ea elektrone. Nakong ea lithaba tsa motlakase, mocheso oa Pini Diode o chitja ka 70 ° C ntle le mocheso ka boomo, joalo ka ha ho bontšitsoe setšoantšo sa s8. Litšoantšo tsa Elecromininincent li ne li fumanoe pele le ka mor'a khatello ea motlakase ka bongata ba 25 A / cm2. Sekhahla sa Synchrotron se hlabang .
Khampani ea Voltage ka bongata ba hona joale ba hajoale ba 2,5 A / cm2 e ntšoa ka nako ea nako ea 0,5 v ho sa feiga. 2 Ho latela CVC ea naha e 'ngoe le e' ngoe ea tefiso ea phini. Ho tsoa boleng ba bona ba ho sithabela maikutlo le ho kheloha ha khatello ea maikutlo, re rera ho tsamaisoa ka mokhoa o tloaelehileng ho setšoantšo sa 2 u sebelisa equation e latelang:
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Nako ea poso: nov-06-2022
