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4h-sic yakhala yolembedwa ngati zinthu zopangira mphamvu semiconductor zida. Komabe, kudalirika kwa nthawi yayitali kwa zida za 4H-sic ndi cholepheretsa ntchito yawo yonse, komanso vuto lofunikira kwambiri la zida 4h-sic ndi kuchepa kwa mpweya. Kuwonongeka kumeneku kumachitika chifukwa cha cholakwika chachikulu (1ssf) kufalitsa kwa ndege ya babal Pano, tikufunsa njira yolambira 1Sssf Kukula mwa proton protons pa 4h-sic epitaxial. Ma din a diodies opangidwa ndi ofesedwa ndi proton information yomwe ili ndi magetsi omwe ali ndi magetsi omwe ali ndi ma diode popanda kuwononga matoni. Mosiyana ndi izi, kukulitsa kwa 1ssf kumawongoleredwa moyenera mu pini ya proton-yofinya. Chifukwa chake, kuphatikiza ma proton mu 4H-sic epitaxial ofiyira ndi njira yothandiza kupondereza kuwonongeka kwa mpweya wa 4h-sic mphamvu yamagetsi posungira zida. Zotsatira zake zimathandizira kukulitsa zida zodalirika za 4h-sic.
Silicon Carbide (SIC) amadziwika kwambiri ngati semiconductor zida za semiconductor, zopitilira muyeso zomwe zimatha kugwira ntchito munkhondo. Pali ma polytypes ambiri a SIC, omwe 4h-sic ali ndi chida chabwino kwambiri cha semiconductor monga electron yoyenda komanso kuwonongeka kwamphamvu kwa magetsi2. 4h-SIC WOPHUNZITSIRA NTHAWI ZILI NDI TSIKU LAPANSI LA 6 pano pakadali pano tagwiritsidwa ntchito popanga magetsi a Semiconductor ya Semiconductor. Katundu wamapepala amagetsi ndi masitima amapangidwa pogwiritsa ntchito 4h-sic4.5 zida zamagetsi za semiconductor. Komabe, zida za 4h-sic zimavutikabe ndi mavuto odalirika monga kusokonekera kwakanthawi kapena kudalirika kwakanthawi kofunikira, 6,7 Kuwonongeka kwa Bipolar kumeneku kunapezeka zaka 20 zapitazo ndipo kwakhala vuto kwa nthawi yayitali.
Kuwonongeka kwa Bipolar kumachitika chifukwa cha chilema chimodzi chonyansa (1ssf) mu makristali a 4h-sic poyambira (BPDS) kufalitsidwa (Reds) kufalitsa dislocation slubung studida (redg) 12,16,18,19,19,19,19,19. Chifukwa chake, ngati kukulitsa kwa BPD kumagundidwa kwa 1ssf, 4h-sic mphamvu zida zitha kuwonongeka popanda kuwonongeka kwa bipolar. Njira zingapo zanenedwapo kuti muchepetse kufalikira kwa BPD, monga BPD kuti ulusi (ted) Kusintha kwa 20,21,22,23,24. Mu gawo laposachedwa kwambiri la epitaxial, bpd limapezeka makamaka koma osati mu epitaxial wosanjikiza chifukwa cha kutembenuka kwa BPD kuti udulidwe panthawi yoyambirira ya kukula kwa etaxial. Chifukwa chake, vuto lotsalira la kuchepa kwa bipolar ndikugawa kwa BPD m'gawo lapansi ,26,27. Kuyika kwa "comprotite yolimbikitsana" pakati pa kusanjikiza koyambira ndipo gawo lapansi lafunsidwa ngati njira yolaula kwa BPD gawo la elect elecking ndi gawo lapansi. Kuchepetsa kuchuluka kwa electron-home kumachepetsa mphamvu yoyendetsa ku Redg mpaka BPD mu gawo lapansi, motero zowonjezera zophatikizika zimatha kupondereza kuchepa kwa mabipolar. Tiyenera kudziwa kuti kulowetsa kwa wosanjikiza kumaphatikizapo ndalama zowonjezera popanga ofera, ndipo popanda kuyika malo osafunikira kuti muchepetse kuwongolera kwa moyo wonyamula. Chifukwa chake, pali kufunika kolemetsa kwina njira kuti akwaniritse mtengo wabwino ndi zipatso zake.
Chifukwa kuwonjezera kwa BPD ku 1ssf kumafuna kuyenda kwa discation yopanda kanthu (ma PD), kuwalembera PD ndi njira yabwino yoletsa kuwonongeka kwa bipolar. Ngakhale kuti pali zitsulo zokhala ndi zitsulo zanenedwapo, FPDs mu 4h-stic miyala imapezeka mtunda wautali wa 5 μm kuchokera pamwamba pa epitaxial wosanjikiza. Kuphatikiza apo, popeza kusiyanasiyana kwachitsulo chilichonse mu sic ndikochepa kwambiri, ndizovuta kuti zitsulo zitsulo kuti zizisokoneza gawo lapansi. Chifukwa cha zitsulo zazikulu za atomiki, zitsulo zowoneka bwino ndizovuta. Mosiyana ndi izi, pankhani ya hydrogen, edrogen, ma ayon (proton) ikhoza kukhazikitsidwa mu 4h-sic mpaka kukula kwa 10 μm pogwiritsa ntchito ntchito zopitilira 10. Chifukwa chake, ngati kuwonongeka kwa proton kumakhudza PD kumatsikira, ndiye kuti zitha kugwiritsidwa ntchito kupondereza kufalitsa kwa BPD m'gawo lapansi. Komabe, kuwonongeka kwa proton kumatha kuwononga 4h-sic ndikupangitsa kuti muchepetse chipangizo chochepetsedwa37,38,39,39,40.
Kuthana ndi kuwonongeka kwa Chipatala Chifukwa cha Proton Kusungunuka, kutentha kwambiri kumagwiritsidwa ntchito kukonza zowonongeka, zomwe zimadziwika ndi ma atomu a hydrogen okhaokha omwe ali pafupi ndi FD sikokwanira kudziwa kufinya kwa pr pogwiritsa ntchito sims. Chifukwa chake, mu kafukufukuyu, tidakhazikitsa ma protocs mu 4h-sic epitaxial Warrs dongosolo la nsalu ya chipangizocho isanachitike, kuphatikiza kutentha kwambiri. Tinagwiritsa ntchito ma pini a pini yoyesera ndikuwapangira pa 4h-sic epitaxial. Kenako tinkaona mikhalidwe yamagetsi yophunzira kuwonongeka kwa chipangizo cha chipangizo chifukwa cha jakisoni wa proton. Pambuyo pake, tinawona kukula kwa 1ssf mu elctifines (El) zithunzi mutatha kugwiritsa ntchito magetsi amagetsi mpaka pini. Pomaliza, tinatsimikizira za jakisoni wa proton pakulanda kwa kufalikira kwa 1ssf.
Pa mkuyu. Chithunzi 1 chikuwonetsa mawonekedwe a voliyumu (ma CVC) a Thodis a PIN kutentha kutentha kumadera omwe ali ndi matoni omwe ali ndi proton asanatulutse. Zingwe za Pini ndi jakisoni zimawonetsa mawonekedwe ofanana ndi ma diocs popanda jakisoni, ngakhale ma IV amagawidwa pakati pa malo okhala. Kuti muwonetse kusiyana pakati pa ma jersecation pafupipafupi, tidakonza magetsi pamtsogolo kwa 2.5 A / CM2 (ofanana mpaka 100) monga chikhomo chojambulidwa ndi mzere wambiri. mzere. Monga momwe mungawonekere kuchokera kumapiri ozungulira, kukana pang'ono kumawonjezereka pang'ono pa proton Mlingo wa 1012 masentimita. Tinkakondanso ma proton atangopanga ma din a doodic omwe sanawonekere magetsi chifukwa chowonongeka chifukwa cha Proton kuwonongeka kwa ma SP1 monga tafotokozera mu maphunziro apitawa37,38,39. Chifukwa chake, kuwongolera pa 1600 ° C pambuyo poti kusokonekera kwa ma ion ndi njira yofunikira kupangira zida zoyambilira, zomwe zimapangitsa ma cvcs pick ma cheodis. Zosintha zomwe zilipo pa -5 v zimaperekedwanso pa Chithunzi S2, palibe kusiyana kwakukulu pakati pa ma dirosoves okhala ndi jakisoni wa proton.
Makhalidwe a Amperal-AMPre a TIND A Din Diodes okhala ndi ma projekiti ophatikizidwa firiji. Nthano ikuwonetsa mlingo wa ma proton.
Pafupipafupi pafupipafupi ku Direct Pafupifupi 2.5 A / CM2 ya ma din a doodies ndi protoni yophatikizidwa. Mzere wosungidwa umafanana ndi kugawa wamba.
Pa mkuyu. 3 ikuwonetsa chithunzi cha chikhomo cha chikhomo chokhala ndi kachulukidwe kakang'ono kwa 25 a / cm2 magetsi. Musanagwiritse ntchito katunduyu, zigawo zakuda za diode sizinawonedwe, monga zikuwonekera pa Chithunzi 3. C2. Komabe, monga tikuwonetsera mkuyu. 3A, mu pini dindode yopanda phula, zigawo zingapo zakuda zokhala ndi m'mphepete zopepuka zimawonedwa mutatha kugwiritsa ntchito magetsi yamagetsi. Zigawo zooneka ngati zooneka ngati el zimawonedwa kwa 1ssf kuyambira pa bpd mu gawo lapansi. M'malo mwake, zolakwa zina zokutira zidawonedwa mu ma cheidies a pini ndi protons, monga akuwonetsera mkuyu. 3B-D. Pogwiritsa ntchito tay X-ray tattoography, tidatsimikizira kukhalapo kwa ma prs omwe amatha kuchoka pa gawo la mapepala okhala ndi proton (mkuyu) Ma diodes amawonetsedwa mu 2 ndi 2. Makanema S3-S6 ndi madera amdima (madera owoneka bwino a pini ya PRON ndi kukhazikitsidwa mu 1014 cm).
Zithunzi za ma pini a pini pa 25 A / CM2 Pambuyo pa maola awiri osokoneza bongo (b) 1012 masentimita 10, (d) 1016 masentimita 10.
Tinawerengera kachulukidwe ka 1ssf powerengera madera amdima ndi m'mphepete mwa zipilala zitatu.
Kuchulukitsa kwa ma pini a SF PINEES ndi PROON KUSINTHA KWAULERE mukadzaza ndi madontho omwe ali ndi madoko omwe ali ndi madokotala atatu.
Kufupikitsa nthawi yonyamula moyo kumakhudzanso kufalikira, ndipo jakisoni wa proton amachepetsa chonyamulira chamoyo, ndipo chimaliziro. Tawonapo nthawi yonyamula nthawi ya etitaxial wosanjikiza 60 μm wandiweyani ndi protones wa asenti wa 1014 cm-2. Kuchokera pamoyo woyamba wonyamula, ngakhale kuti kuphatikizika kumachepetsa mtengo wake ~ 10%, kugwirizirana kotsatira kumabwezeretsa ku ~ 50%, monga akuwonetsera mkuyu. S7. Chifukwa chake, moyo wonyamula, wochepetsedwa chifukwa cha kusokonekera kwa proton, kubwezeretsedwa ndi kutentha kwambiri. Ngakhale kuchepa kwa 50% mu moyo wa onyamula kumalepheretsa kufalitsa zolakwa za I Chifukwa chake, timakhulupirira kuti kutchuka kwa PD PLCHORY kumachita mbali yolepheretsa kufalikira kwa 1Sssf.
Ngakhale sims sanazindikire hydrogen atayatsidwa pa 1600 ° C, monga adanenedwa m'maphunziro am'mbuyomu, chifukwa chake, tikuwonetsa muyezo wa SMS (2). 3) kukhazikitsa. Tiyenera kudziwa kuti sitinatsimikizire kuwonjezeka kwa boma chifukwa cha kuchuluka kwa 1ssf atatha kupanikizidwa. Izi zitha kukhala chifukwa cha odziwana ndi ungwiro opangidwa ndi ungwiro wopangidwa pogwiritsa ntchito njira yathu, yomwe idzachotsedwa mtsogolo.
Pomaliza, tinapanga njira yopumira yowonjezera bpd mpaka 1ssf mu 4h-sic pineraid doodies pogwiritsa ntchito proton isanachitike pakhungu. Kuwonongeka kwa I-V mawonekedwe pa proton kumasuka, makamaka pamlingo wa madongosolo a 1012 cm. Ngakhale mu kafukufukuyu tidapanga zikhomo 10 μm zokhala ndi ma proton mpaka kuzama kwa 10 μm, ndizothekabe kutsimikiza kuti mukonzekere zoikika ndikuwagwiritsa ntchito kupanga mitundu ya 4h-scrices. Ndalama zowonjezera za nsalu za chipangizo nthawi ya proton kuyenera kuganiziridwa, koma adzakhala ofanana ndi a aluminiyamu ion ikani, yomwe ndi njira yayikulu ya magetsi a mphamvu ya 4h-sic. Chifukwa chake, kugwedeza kwa proton isanachitike pazinthu za chipangizochi ndi njira yomwe ingakwaniritse zida zamphamvu za 4h-sic.
Ma 4-inchi n-mtundu wa 4h-sic wowoneka bwino ndi makulidwe a 10 μm ndi wopereka ndalama kukhazikika kwa 1 × 1016 cm-3 adagwiritsidwa ntchito ngati chitsanzo. Musanalowerere chipangizocho, h + ion ikani mu mbale ndi mphamvu yothamanga ya 0,95 mev kutentha kwa firiji mpaka 10 μm pachikwangwanithunzi cha 10 μm. Pa proton inhalation, chigoba pa mbale chidagwiritsidwa ntchito, ndipo mbaleyo inali ndi zigawo zosakhala ndi ma proton mlingo wa 1012, 1014, kapena 1016 cm-2. Kenako, ma ion ndi proton Mlingo wa 1020 ndi 1017 masentimita-3 adayikidwa pamwamba pa kuyala kwa 0-0.2 μm ndi 0,2-0.5 μm ndi 0,2-0.5 μm ndi 0,2-0.5 -Kodi. Pambuyo pake, kumbali yakumbuyo koma komwe kunasungidwa mbali yodutsa, pomwe 2.0 mm × 20 mm kulumikizana komwe kumapangidwa ndi Photolithography ndi njira yolumikizira mbali ya epitaxial. Pomaliza, kulumikizana ndi kuwongolera kumachitika kutentha kwa 700 C. Mukadula bwino m'chips, tidachita zipsinjo ndi ntchito.
Makhalidwe a i-Vi a ma din a dinc amawonedwa pogwiritsa ntchito HP4155B Semiconductor parameter. Monga kupsinjika kwamagetsi, ma millisecrond omwe ali ndi 102.5 A / CM2 adayambitsidwa kwa maola awiri pa pafupipafupi ma pullery / sec. Tidasankha kachulukidwe kakang'ono kapena pafupipafupi, sitinaone kukula kwa 1sssf ngakhale mutakhala ndi pini yopanda jekeseni. Pa magetsi amagetsi, kutentha kwa pini diide ndi pafupifupi 70 ° C popanda kuwotcha, monga tikuonera pa Chithunzi S8. Zithunzi zamagetsi zinapezeka kale komanso pambuyo pamagetsi zamagetsi pamlingo 25 wa / masentimita. Synchrotron Kusinkhasinkha Kuchita Zinthu za X-ray tourpoot pogwiritsa ntchito mtundu wa monochromic X-ray) ku AG.15 kapena 11-18 (onani). ).
Magetsi pafupipafupi pamtsogolo kwa 25 a / cm2 amachotsedwa ndi nthawi ya 0,5 V mu mkuyu. 2 Malinga ndi CVC ya boma lililonse la pini. Kuchokera pamtengo wa nkhawa za kupsinjika ndi kupatuka kofananako
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Post Nthawi: Nov-06-2022
